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1700C CVD 3-zone Vacuum Tube Furnace with MFC Gas Mixer and Molecular Pump Unit
PTC D80/1500/17/3
Classification:
PT D80/1500/17 is a three-zone CVD high vacuum OD80 alumina tube furnace, heating length 1500mm. Equips with a molecular vacuum pump unit, 3-channel digital MFC gas mixing system, water cooling system, tube diameter 80mm, max temeprature up to 1700 degree C.
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- Commodity name: 1700C CVD 3-zone Vacuum Tube Furnace with MFC Gas Mixer and Molecular Pump Unit
- Commodity ID: PTC D80/1500/17/3
- 产品概述: PT D80/1500/17 is a three-zone CVD high vacuum OD80 alumina tube furnace, heating length 1500mm. Equips with a molecular vacuum pump unit, 3-channel digital MFC gas mixing system, water cooling system, tube diameter 80mm, max temeprature up to 1700 degree C.
<p>CVD, 3-zone, high vacuum tube furnace</p> <p>MFC controlled 3-channel gas mixer</p> <p>Molecular pump unit, max vacuum level 10-5 torr</p>
Product Overview
PT D80/1500/17/3 is a high-temperature, three-zone CVD high-vacuum tube furnace. OD80mm alumina tube, heating length 1500mm. Equips with molecular pump with vacuum level up to 10-5torr, 3 channels MFC precise controlled gas mixing. 304SS water cooling flanges with needle valves and gauge, multiple air inlets and outlets for various gases. It adopts a microprocessor-based self-tuning Yudian PID temperature control system with temperature control accuracy of +/-1°C, MoSi2 rods heated, Max temperature can reach to 1700°C (1500°C under high vacuum). The 3-zone high vacuum tube furnace is mainly used for vacuum and atmospheric protection sintering, vacuum thin film coating, CVD experiments etc. It's also suitable for minaral testing, Jewelry, such as precious gemstones （N2, Co2 ,Ar, O2, H2 More).
Main Features
- Tmax 1700℃
- 3 heating zone high vacuum, CVD tube furnace
- Dual steel structure, minium heat loss
- Molecular pump unit, max vacuum level up to 10-5 torr
- 3-channel MFC controlled gas mixer
- Fiber-insulated chamber with MoSi2 heating elements for maximum temperature stability and uniformity
- 304SS water cooling sealed flanges
- Digital PID controller with programmable 30 segments with accuracy of +/-1°C
- B type thermocouple
- ISO, CE
Product Details
1700°C CVD 3 Zone Vacuum Tube Furnace with MFC Gas Mixer and Water Cooling Device
- PT D80/1500/17 is mainly composed of seven parts: furnace body, furnace tube, flange sealing accessories, gas supplying system, water cooling system, vacuum pumping system and temperature control system
- The furnace outer steel shell is processed with pickling and phosphating, environment powder coating on the surface, corrosion and oxidation resistance, built-in cooling fan, surface temperature Rt+45℃
- Exquisite appearance, ISO, CE compliance
Chamber profile for 1700°C CVD 3 zones high vacuum tube furnace
- High alumina ceramic insulation, CNC engraving, chamber walls coupling tightly, U type MoSi2 heater, temperature resistance up to 1800C
- Heating length 600mm, suitable for alumina tube diameter 60mm. High alumina processing tube, temperature resistance up to 1700℃，The critical part of the heating zone inside the furnace tube is equipped with the ceramic tube plug, which can effectively prevent heat from escaping and reduce heat loss
- B type thermocouple
Water cooling flange, 1/4" pagoda gas nozzle, Molecular vacuum pump unit
- Equipped with SS304 water cooling flange set, sealed with high-temperature resistant fluorine rubber sealing rings
- The air inlet and outlet adopts G1/4-inch pagoda air nozzle, which can be connected to a PTFE pipe with an outer diameter of 8mm
- Connected molecular pump unit with KF25, make sure vacuum level reach to 10*-5mbar
HEATING PROGRAMS FOR 1700°C CVD HIGH TEMP 3 ZONES TUBE FURNACE
- Programmable 30 segments, heating rate 1-10C/min freely adjusted
- Good thermal insualtion, natural cooling, cooling down gently
- 7" touchscreen panel is optional, heating programs can be showed timely, and downloaded
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Detail Technical Specifications
Model No.
PTC D80/1500/17/3 Structure Dual steel shell, ceramic chamber, alumina tube, MFC gas supplying system, vacuum system, watering cooling system,temperature controlling system etc Heating length 3 independent heating zone, total length1500mm (each zone 500mm) Temp. uniformity ±5℃，(length 800mm) Tube size OD80mm, ID70mm, length 2300mm Tube material High alumina content processing tube 99.6% Power supply 25KW AC380V 50Hz
Phase 3 phases Working temperature Tmax：1700℃
Continuous working temperature：1600℃Sealing flange SS304 quick-opening sealing flanges with needle valve and pressure gauge Atmosphere performance Available gases: Ar N2 H2 etc. Vacuum performance Max vacuum level could reach to 10-3torr provided with molecular pump unit Gas supplying system Equips an individual set of single channel gas supplying device with gas inlet&outlet;
Gas flowing rate: 60-600ml/minTemperature controller Yudian PID controller
Auto-tune function
Programmable 30 segments
Temperature accuracy +/- 1°CHeating elements MoSi2 heating elements Heating rate Max heating rate：10℃/min
recommended heating rate：1-8℃/minThermocouple type B Furnace shell Dual carbon steel shell Chamber material 1800# Ceramic alumina insulation Electric components Schneider maker air switch, AC contactor, SSR Relay etc Safety measures Over heating, thermocouple breaking alarm and protection Compliance CE, ISO Warranty 18 months quality warranty with lifetime technical support (excluded consumable parts such as quartz tube, thermocouple etc) Standard packing list Tube furnace; alumina tube, sealing flanges, gas tube, furnace hook, thermal gloves, manual book etc Shipment information Gross weight：600 kgs
packing size：W800xL2650xH1560mmOptional accessories Vacuum pump unit; MFC system Warning 1. The processing tube pressure should be lower 0.02MPa
2. Gas source should equip the pressure reducing valve
3. Before filling reduction gases like H2, should pump the air out of the tube
4. When filling gases from gas inlet in the tube, should make sure the gas outlet valve openSimilar model comparison
Model No. PT D40/300/17 PT D60/300/17 PT D80/300/17 Heating length 300mm 300mm 300mm Tube size OD40xL900mm OD60xL900mm OD80xL900mm Power supply 3 KW 4 KW 5 KW Weight 185 KGS 238 KGS 276 KGS
Key words:
3 zone Tube Furnace
CVD Tube Furnace
Vacuum Tube Furnace
1700C Tube Furnace
Qualification Honor
Calibration certificate muffle furnace Calibration certificate
ATEX CE
ECM CE
UDEM CE
SGS认证
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Powerful engineer team make free customization based on your technical reqeusts
Fast delivery: 7-25 working days
Special discount: Universities OR Research institutes could apply special discount $100-$500 based on contract amount Excellent after-sales service: Free parts supplied including courrier cost to door; local distributor maintaining; 7/24 hours on line
OEM/ODM is acceptable
Certificates: UDEM CE, ECM CE, TUV EC, ATEX CE, SGS, ISO
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